Invention Grant
- Patent Title: Polishing method and polishing apparatus
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Application No.: US15697047Application Date: 2017-09-06
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Publication No.: US10195712B2Publication Date: 2019-02-05
- Inventor: Toru Maruyama , Hisanori Matsuo , Yasuyuki Motoshima
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2013-175471 20130827
- Main IPC: B24B37/015
- IPC: B24B37/015 ; B24B49/14 ; B24B55/02 ; G01J5/02 ; G01J5/00

Abstract:
A polishing method and a polishing apparatus which can increase a polishing rate and can control a polishing profile of a substrate being polished by adjusting a surface temperature of a polishing pad are disclosed. The polishing method for polishing a substrate by pressing the substrate against a polishing pad on a polishing table includes a pad temperature adjustment step of adjusting a surface temperature of the polishing pad, and a polishing step of polishing the substrate by pressing the substrate against the polishing pad having the adjusted surface temperature. In the pad temperature adjustment step, the surface temperature of a part of an area of the polishing pad, the area being to be brought in contact with the substrate, is adjusted during the polishing step so that the rate of temperature change of a temperature profile in a radial direction of the surface of the polishing pad becomes constant in the radial direction of the polishing pad.
Public/Granted literature
- US20180021917A1 POLISHING METHOD AND POLISHING APPARATUS Public/Granted day:2018-01-25
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