- Patent Title: Lapping pads and systems and methods of making and using the same
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Application No.: US15234720Application Date: 2016-08-11
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Publication No.: US10195713B2Publication Date: 2019-02-05
- Inventor: Masahi Norimoto
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Agent Adam Bramwell; Jeffrey S. Kollodge
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24D3/32 ; B24B37/22 ; B24B37/015 ; B24B37/26

Abstract:
The present disclosure relates to lapping pads which include an abrading layer, wherein the abrading layer includes a working surface and a second surface opposite the working surface having a projected area Ap, and at least one cavity having a cavity opening located at the second surface, the at least one cavity being defined by at least one rib, each rib having a distal end at the second surface; and a phase transition material having a thermally reversible phase transition, wherein the phase transition material is disposed in the at least one cavity. The present disclosure further relates to a lapping system, the lapping system includes a lapping pad of the present disclosure and a working fluid; a method of making a lapping pad; and a method of lapping using a lapping pad of the present disclosure.
Public/Granted literature
- US20180043498A1 LAPPING PADS AND SYSTEMS AND METHODS OF MAKING AND USING THE SAME Public/Granted day:2018-02-15
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