Invention Grant
- Patent Title: Ferroelectric film and method of producing same
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Application No.: US15080728Application Date: 2016-03-25
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Publication No.: US10195827B2Publication Date: 2019-02-05
- Inventor: Hideaki Sakurai , Jun Fujii , Nobuyuki Soyama
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JP2015-064152 20150326; JP2016-054836 20160318
- Main IPC: B32B18/00
- IPC: B32B18/00 ; H01G4/12 ; C04B35/491 ; C23C18/12 ; H01L41/187 ; H01L41/318 ; C04B35/622
Abstract:
A ferroelectric film a plurality of fired films is provided. E each of the plurality of fired films is made of metal oxide in a perovskite structure including Pb, Zr, and Ti, a total content of Li, Na, and K in the each of the plurality of fired films is 3 mass ppm or less, and the total content of Li, Na, and K on one surface of each of the plurality of fired films is 5 times or more of the total concentration of Li, Na, and K on other surface of each of the plurality of fired films.
Public/Granted literature
- US20160279906A1 FERROELECTRIC FILM AND METHOD OF PRODUCING SAME Public/Granted day:2016-09-29
Information query
