Invention Grant
- Patent Title: Process for manufacturing a microelectromechanical interaction system for a storage medium
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Application No.: US11958945Application Date: 2007-12-18
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Publication No.: US10196262B2Publication Date: 2019-02-05
- Inventor: Giuseppe Barillaro , Alessandro Diligenti , Caterina Riva , Roberto Campedelli , Stefano Losa
- Applicant: Giuseppe Barillaro , Alessandro Diligenti , Caterina Riva , Roberto Campedelli , Stefano Losa
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITTO2006A0907 20061220
- Main IPC: H01L27/10
- IPC: H01L27/10 ; B81C1/00

Abstract:
A process for manufacturing an interaction system of a microelectromechanical type for a storage medium, the interaction system provided with a supporting element and an interaction element carried by the supporting element, envisages the steps of: providing a wafer of semiconductor material having a substrate with a first type of conductivity (P) and a top surface; forming a first interaction region having a second type of conductivity (N), opposite to the first type of conductivity (P), in a surface portion of the substrate in the proximity of the top surface; and carrying out an electrochemical etch of the substrate starting from the top surface, the etching being selective with respect to the second type of conductivity (N), so as to remove the surface portion of the substrate and separate the first interaction region from the substrate, thus forming the supporting element.
Public/Granted literature
- US20080164576A1 PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYSTEM FOR A STORAGE MEDIUM Public/Granted day:2008-07-10
Information query
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