Invention Grant
- Patent Title: Vapor deposition device and method for producing organic EL display device
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Application No.: US16063295Application Date: 2016-11-25
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Publication No.: US10196737B2Publication Date: 2019-02-05
- Inventor: Satoshi Inoue , Shinichi Kawato , Yuhki Kobayashi
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- International Application: PCT/JP2016/085022 WO 20161125
- International Announcement: WO2018/096659 WO 20180531
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C23C14/24 ; H01L51/56 ; C23C14/12 ; C23C14/04 ; H01L51/00

Abstract:
On a vapor deposition target surface of a vapor deposition target substrate placed on a substrate tray in a vapor deposition device, display regions on which vapor deposition particles are to be deposited are arranged in alignment to be apart from each other in a direction parallel with a scanning direction, and the substrate tray includes a blocking part configured to block the vapor deposition particles to be deposited onto regions adjacent to the display regions in a direction parallel with the scanning direction. This prevents a degree of freedom in designing of the vapor deposition target substrate from being restricted even in performing scan vapor deposition.
Public/Granted literature
- US20180371604A1 VAPOR DEPOSITION DEVICE AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE Public/Granted day:2018-12-27
Information query
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