Probe head of three-dimensional coordinate measuring device and touch detection method
Abstract:
A probe head of a three-dimensional coordinate measuring device according to an embodiment of the present invention includes a measurer, a first and second diaphragm, a first oscillator, and a second oscillator. The measurer extends in a first direction. The first and second diaphragms are provided at two different positions on the measurer, at a first position and a second position, respectively, and support the measurer such that the measurer is capable of displacement in a first direction. The first oscillator causes the measurer to oscillate along the first direction. The second oscillator causes a predetermined portion of the measurer between the first and second diaphragms to oscillate along each of a second direction orthogonal to the first direction, and a third direction orthogonal to both the first and second directions.
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