Invention Grant
- Patent Title: Probe head of three-dimensional coordinate measuring device and touch detection method
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Application No.: US15427576Application Date: 2017-02-08
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Publication No.: US10197375B2Publication Date: 2019-02-05
- Inventor: Hisayoshi Sakai
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2016-023604 20160210
- Main IPC: G01B5/016
- IPC: G01B5/016 ; G01B7/012

Abstract:
A probe head of a three-dimensional coordinate measuring device according to an embodiment of the present invention includes a measurer, a first and second diaphragm, a first oscillator, and a second oscillator. The measurer extends in a first direction. The first and second diaphragms are provided at two different positions on the measurer, at a first position and a second position, respectively, and support the measurer such that the measurer is capable of displacement in a first direction. The first oscillator causes the measurer to oscillate along the first direction. The second oscillator causes a predetermined portion of the measurer between the first and second diaphragms to oscillate along each of a second direction orthogonal to the first direction, and a third direction orthogonal to both the first and second directions.
Public/Granted literature
- US20170227345A1 PROBE HEAD OF THREE-DIMENSIONAL COORDINATE MEASURING DEVICE AND TOUCH DETECTION METHOD Public/Granted day:2017-08-10
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