- Patent Title: Dynamic quantity measuring device and pressure sensor using same
-
Application No.: US15314768Application Date: 2015-06-01
-
Publication No.: US10197463B2Publication Date: 2019-02-05
- Inventor: Kentarou Miyajima
- Applicant: Hitachi Automotive Systems, Ltd.
- Applicant Address: JP Hitachinaka-shi
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: JP Hitachinaka-shi
- Agency: Crowell & Moring LLP
- Priority: JP2014-118286 20140609
- International Application: PCT/JP2015/065717 WO 20150601
- International Announcement: WO2015/190331 WO 20151217
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L27/00 ; G01M15/08

Abstract:
Provided are a dynamic quantity measuring device having higher accuracy and longer-term reliability than in the prior art, and a pressure sensor using the same. A dynamic quantity measuring device is provided with a first Wheatstone bridge configured by an impurity diffused resistor on a principal surface of one semiconductor substrate, and detects a difference between strain quantities respectively generated in an x-axis direction and a y-axis direction that are orthogonal to each other on the principal surface of the semiconductor substrate by the first Wheatstone bridge, the dynamic quantity measuring device being provided with, on the principal surface of the semiconductor substrate, a second Wheatstone bridge for detecting the strain quantity in the x-axis direction, and a third Wheatstone bridge for detecting the strain quantity in the y-axis direction.
Public/Granted literature
- US20170199096A1 Dynamic Quantity Measuring Device and Pressure Sensor Using Same Public/Granted day:2017-07-13
Information query