Invention Grant
- Patent Title: Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
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Application No.: US13710315Application Date: 2012-12-10
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Publication No.: US10197501B2Publication Date: 2019-02-05
- Inventor: Yung-Ho Alex Chuang , Xuefeng Liu , John Fielden , David L. Brown
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: G01N21/88
- IPC: G01N21/88 ; H01L27/148 ; G01N21/95 ; H01J31/26 ; G01N21/956

Abstract:
A focusing EBCCD includes a control device positioned between a photocathode and a CCD. The control device has a plurality of holes therein, wherein the plurality of holes are formed perpendicular to a surface of the photocathode, and wherein a pattern of the plurality of holes is aligned with a pattern of pixels in the CCD. Each hole is surrounded by at least one first electrode, which is formed on a surface of the control device facing the photocathode. The control device may include a plurality of ridges between the holes. The control device may be separated from the photocathode by approximately half a shorter dimension of a CCD pixel or less. A plurality of first electrodes may be provided, wherein each first electrode surrounds a given hole and is separated from the given hole by a gap.
Public/Granted literature
- US20130148112A1 Electron-Bombarded Charge-Coupled Device And Inspection Systems Using EBCCD Detectors Public/Granted day:2013-06-13
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