Invention Grant
- Patent Title: Method and system for low cost inspection
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Application No.: US12673784Application Date: 2008-08-21
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Publication No.: US10197505B2Publication Date: 2019-02-05
- Inventor: Ophir Peleg , Zehava Ben Ezer
- Applicant: Zehava Ben Ezer
- Applicant Address: IL Migdal Haeemek
- Assignee: CAMTEK LTD.
- Current Assignee: CAMTEK LTD.
- Current Assignee Address: IL Migdal Haeemek
- Agency: Raches Patents
- International Application: PCT/IL2008/001144 WO 20080821
- International Announcement: WO2009/024978 WO 20090226
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/88 ; H01L21/66

Abstract:
A method for macro inspection, the method includes: (i) concurrently illuminating a current group of spaced apart object sub areas; wherein light reflected in a specular manner from a certain object sub area of the current group of object sub areas is expected to be detected by a certain sensor element of a current group of spaced apart sensor elements that correspond to the current group of spaced apart object sub areas; wherein the object sub areas are spaced apart so as to reduce a probability of a detection of non-specular light from the object; wherein each image sub area comprises multiple pixels; (ii) obtaining image information from the current group of spaced apart sensor elements; and (iii) processing at least a portion of the image information to provide an inspection result.
Public/Granted literature
- US20110164806A1 METHOD AND SYSTEM FOR LOW COST INSPECTION Public/Granted day:2011-07-07
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