Invention Grant
- Patent Title: FET and fiber based sensor
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Application No.: US15249522Application Date: 2016-08-29
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Publication No.: US10197526B2Publication Date: 2019-02-05
- Inventor: Cornel P. Cobianu , Bogdan-Catalin Serban , Viorel Georgel Dumitru , Octavian Buiu , Alisa Stratulat , Mihai Brezeanu
- Applicant: Honeywell International Inc.
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: EP15183782 20150903
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L29/06 ; H01L29/788 ; H01L29/78 ; H01L29/66 ; H03F3/45 ; G01N33/00

Abstract:
A gas sensor includes a field effect transistor supported on an oxide layer of a substrate, the field effect transistor having a doped source (p+ doped for T-FET and n+ doped for FET) and an n+ doped drain separated by an channel region (intrinsic for T-FET or slightly p-doped for FET), and a floating gate separated from the channel region by a gate oxide, a passivation layer covering the floating gate, and a sensing layer supported by the passivation layer, the sensing layer comprising nanofibers.
Public/Granted literature
- US20170067849A1 FET AND FIBER BASED SENSOR Public/Granted day:2017-03-09
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