Invention Grant
- Patent Title: Physical quantity sensor, electronic device, and moving object
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Application No.: US15919527Application Date: 2018-03-13
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Publication No.: US10197591B2Publication Date: 2019-02-05
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-163000 20130806
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B3/00 ; G01P15/08

Abstract:
A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.
Public/Granted literature
- US20180203033A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOVING OBJECT Public/Granted day:2018-07-19
Information query
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