Invention Grant
- Patent Title: Method and apparatus of operating a scanning probe microscope
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Application No.: US15806103Application Date: 2017-11-07
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Publication No.: US10197596B2Publication Date: 2019-02-05
- Inventor: Jian Shi , Yan Hu , Shuiqing Hu , Ji Ma , Chanmin Su
- Applicant: Bruker Nano, Inc.
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson S.C.
- Main IPC: G01Q20/00
- IPC: G01Q20/00 ; B82Y35/00 ; G01Q10/06 ; G01Q60/32 ; G01Q20/02 ; G01Q60/30 ; G01Q60/34 ; G01Q60/24

Abstract:
Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.
Public/Granted literature
- US20180136251A1 Method and Apparatus of Operating a Scanning Probe Microscope Public/Granted day:2018-05-17
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