Invention Grant
- Patent Title: Metal-dielectric optical filter, sensor device, and fabrication method
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Application No.: US14308343Application Date: 2014-06-18
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Publication No.: US10197716B2Publication Date: 2019-02-05
- Inventor: Georg J. Ockenfuss , Tim Gustafson , Jeffrey James Kuna , Markus Bilger , Richard A Bradley
- Applicant: Viavi Solutions Inc.
- Applicant Address: US CA San Jose
- Assignee: VIAVI Solutions Inc.
- Current Assignee: VIAVI Solutions Inc.
- Current Assignee Address: US CA San Jose
- Agency: Harrity & Harrity, LLP
- Main IPC: G02B5/28
- IPC: G02B5/28 ; H01L27/146 ; G02B1/10

Abstract:
An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
Public/Granted literature
- US20170227695A9 METAL-DIELECTRIC OPTICAL FILTER, SENSOR DEVICE, AND FABRICATION METHOD Public/Granted day:2017-08-10
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