Invention Grant
- Patent Title: MEMS device with piezoelectric actuation, a projective MEMS system including the MEMS device and related driving method
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Application No.: US15588204Application Date: 2017-05-05
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Publication No.: US10197795B2Publication Date: 2019-02-05
- Inventor: Francesco Procopio , Giulio Ricotti
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102016000121010 20161129
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G03B21/00 ; H01L41/04 ; H01L41/09

Abstract:
A MEMS device includes a fixed supporting body forming a cavity, a mobile element suspended over the cavity, and an elastic element arranged between the fixed supporting body and the mobile element. First, second, third, and fourth piezoelectric elements are mechanically coupled to the elastic element, which has a shape symmetrical with respect to a direction. The first and second piezoelectric elements are arranged symmetrically with respect to the third and fourth piezoelectric elements, respectively. The first and fourth piezoelectric elements are configured to receive a first control signal, whereas the second and third piezoelectric elements are configured to receive a second control signal, which is in phase opposition with respect to the first control signal so that the first, second, third, and fourth piezoelectric elements deform the elastic element, with consequent rotation of the mobile element about the direction.
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