Invention Grant
- Patent Title: Silicon-containing resists underlayer film-forming composition having phenyl group-containing chromophore
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Application No.: US15319705Application Date: 2015-06-16
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Publication No.: US10197917B2Publication Date: 2019-02-05
- Inventor: Makoto Nakajima , Wataru Shibayama , Satoshi Takeda , Kenji Takase
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-124311 20140617
- International Application: PCT/JP2015/067319 WO 20150616
- International Announcement: WO2015/194555 WO 20151223
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/16 ; G03F7/20 ; G03F7/26 ; G03F7/30 ; C08G77/28 ; G03F7/075 ; C09D183/08 ; H01L21/027 ; H01L21/033 ; H01L21/311

Abstract:
The present invention provides a resist underlayer film-forming composition for lithography for forming a resist underlayer film that can be used as a hard mask with use of hydrolysis-condensation product of a hydrolyzable silane which also absorbs KrF laser. A resist underlayer film-forming composition for lithography comprising, as a silane, a hydrolyzable silane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof, wherein the hydrolyzable silane includes a hydrolyzable silane of Formula (1): R1aR2bSi(R3)4−(a+b) Formula (1) [where R1 is an organic group of Formula (2): and is bonded to a silicon atom through a Si−C bond; R3 is an alkoxy group, an acyloxy group, or a halogen group; a is an integer of 1; b is an integer of 0 to 2; and a+b is an integer of 1 to 3], and a ratio of sulfur atoms to silicon atoms is 7% by mole or more in the whole of the silane. A resist underlayer film obtained by applying the resist underlayer film-forming composition onto a semiconductor substrate and baking it.
Public/Granted literature
- US20170146906A1 SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION HAVING PHENYL GROUP-CONTAINING CHROMOPHORE Public/Granted day:2017-05-25
Information query
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