Invention Grant
- Patent Title: Variable space mandrel cut for self aligned double patterning
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Application No.: US15430039Application Date: 2017-02-10
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Publication No.: US10199265B2Publication Date: 2019-02-05
- Inventor: Jiehui Shu , Byoung Youp Kim , Jinping Liu
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/532

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to variable space mandrel cut for self-aligned double patterning and methods of manufacture. The method includes: forming a plurality of mandrels on a substrate; forming spacers about the plurality of mandrels and exposed portions of the substrate; removing a portion of at least one of the plurality of mandrels to form an opening; and filling in the opening with material.
Public/Granted literature
- US20180233404A1 VARIABLE SPACE MANDREL CUT FOR SELF ALIGNED DOUBLE PATTERNING Public/Granted day:2018-08-16
Information query
IPC分类: