Invention Grant
- Patent Title: Integrated circuit interconnect structure having metal oxide adhesive layer
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Application No.: US15390633Application Date: 2016-12-26
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Publication No.: US10199266B2Publication Date: 2019-02-05
- Inventor: Shruti Rajeev Jaywant
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Patent Capital Group
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/768 ; H01L23/532 ; H01L23/498

Abstract:
Integrated circuit interconnect structures having a metal oxide adhesive layer between conductive interconnects and dielectric material, as well as related apparatuses and methods are disclosed herein. For example, in some embodiments, an integrated circuit interconnect structure may include a dielectric layer having 60% or more filler, a conductive layer, and a metal oxide adhesive layer between the dielectric and conductive layers. In some embodiments, the metal oxide adhesive layer may include one or more of aluminum oxide, chromium oxide, and nickel oxide.
Public/Granted literature
- US20180182709A1 INTEGRATED CIRCUIT INTERCONNECT STRUCTURE HAVING METAL OXIDE ADHESIVE LAYER Public/Granted day:2018-06-28
Information query
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