Invention Grant
- Patent Title: Semiconductor and metal alloy interconnections for a 3D circuit
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Application No.: US15335092Application Date: 2016-10-26
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Publication No.: US10199276B2Publication Date: 2019-02-05
- Inventor: Claire Fenouillet-Beranger , Fabrice Nemouchi
- Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1560243 20151027
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/822 ; H01L21/768 ; H01L27/06

Abstract:
Fabrication of an integrated circuit comprising: at least one first transistor made at least partially in a first semiconducting layer, at least one second transistor made at least partially in a second semiconducting layer formed above the first semiconducting layer, an insulating layer formed between the first transistor and the second transistor, one or several connection elements passing through the insulating layer between the first and the second transistor, at least one connection element being connected to the first and/or the second transistor and being based on a metal-semiconductor alloy.
Public/Granted literature
- US20170117186A1 SEMICONDUCTOR AND METAL ALLOY INTERCONNECTIONS FOR A 3D CIRCUIT Public/Granted day:2017-04-27
Information query
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