Invention Grant
- Patent Title: Method for detecting bonding failure part and inspection system
-
Application No.: US15509345Application Date: 2015-08-31
-
Publication No.: US10199280B2Publication Date: 2019-02-05
- Inventor: Kei Harada
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-202740 20141001
- International Application: PCT/JP2015/004394 WO 20150831
- International Announcement: WO2016/051660 WO 20160407
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H01L21/66 ; H01L33/00 ; G01N21/88 ; H01L21/68 ; H01L21/683 ; H01L23/00 ; H01L27/146 ; G01N21/95 ; G06T7/00 ; G01N21/84

Abstract:
According to the present invention, there is provided a method for detecting a bonding failure part of a compound semiconductor chip cut from a compound semiconductor wafer in which a first transparent substrate composed of a compound semiconductor having a light-emitting layer is bonded with a second transparent substrate composed of a compound semiconductor, including irradiating the compound semiconductor chip with a coaxial vertical light, and identifying a color of a reflected-light from the bonding failure part of the compound semiconductor chip to detect the bonding failure part. As a result, it is possible, to provide a method for detecting a bonding failure part which can precisely detect a bonding failure part on a bonding interface of a compound semiconductor chip cut from a compound semiconductor wafer in which two transparent substrates composed of a compound semiconductor are directly bonded with each other.
Public/Granted literature
- US20170278758A1 METHOD FOR DETECTING BONDING FAILURE PART AND INSPECTION SYSTEM Public/Granted day:2017-09-28
Information query