Invention Grant
- Patent Title: Semiconductor device and method of aligning semiconductor wafers for bonding
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Application No.: US15817423Application Date: 2017-11-20
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Publication No.: US10199316B2Publication Date: 2019-02-05
- Inventor: Michael J. Seddon , Francis J. Carney
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: IPTechLaw
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/48 ; H01L21/3065 ; H01L21/78 ; H01L23/495 ; H01L21/67 ; H01L21/66 ; H01L21/56 ; H01L23/31 ; H02M3/158 ; H01L23/482 ; H01L25/065 ; H01L25/00 ; H01L23/544 ; H01L23/00 ; H01L21/02 ; H01L21/304 ; H01L21/308 ; H01L27/146 ; H01L21/288 ; H01L21/683 ; H01L21/768 ; H01L23/48 ; H01L27/02 ; H01L27/088 ; H01L27/14 ; H01L29/08 ; H01L23/15

Abstract:
A semiconductor device has a first semiconductor wafer. The first semiconductor wafer is singulated to provide a first wafer section including at least one first semiconductor die or a plurality of first semiconductor die. The first wafer section is a fractional portion of the first semiconductor wafer. An edge support structure is formed around the first wafer section. A second wafer section includes at least one second semiconductor die. The second wafer section can be an entire second semiconductor wafer. The first semiconductor die is a first type of semiconductor device and the second semiconductor die is a second type of semiconductor device. An alignment opening is formed through the first wafer section and second wafer section with a light source projected through the opening. The first wafer section is bonded to the second wafer section with the first semiconductor die aligned with the second semiconductor die.
Public/Granted literature
- US20180076120A1 SEMICONDUCTOR DEVICE AND METHOD OF ALIGNING SEMICONDUCTOR WAFERS FOR BONDING Public/Granted day:2018-03-15
Information query
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