Invention Grant
- Patent Title: Side ported MEMS sensor device package and method of manufacturing thereof
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Application No.: US15637039Application Date: 2017-06-29
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Publication No.: US10199344B2Publication Date: 2019-02-05
- Inventor: Mikko V A Suvanto
- Applicant: Akustica, Inc. , Robert Bosch GmbH
- Applicant Address: US PA Pittsburgh DE Stuttgart
- Assignee: Akustica, Inc.,Robert Bosch GmbH
- Current Assignee: Akustica, Inc.,Robert Bosch GmbH
- Current Assignee Address: US PA Pittsburgh DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: B81B7/02
- IPC: B81B7/02 ; B81C1/00 ; H01L23/00 ; B81B7/00 ; H01L25/16

Abstract:
A MEMS sensor device package comprises a sensor assembly comprising a sensor device and a sensor circuit communicating coupled to the sensor device, The MEMS sensor device package further comprises an assembly package housing having a top member and a bottom member attached to the top member for encapsulating the sensor assembly. A passageway fluidly coupled the sensor device to attributes outside the package housing the passageway is embedded into the package housing, wherein the top member comprising a top wall and side walls, the side walls are attached to the bottom member, and the passageway is embedded into at least one of the side walls.
Public/Granted literature
- US20180005969A1 Side Ported MEMS Sensor Device Package and Method of Manufacturing Thereof Public/Granted day:2018-01-04
Information query