Invention Grant
- Patent Title: Monolithic integrated device
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Application No.: US15494272Application Date: 2017-04-21
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Publication No.: US10199430B2Publication Date: 2019-02-05
- Inventor: Mohanraj Soundara Pandian , Wee Song Tay , Venkatesh Madhaven , Arjun Kumar Kantimahanti
- Applicant: Silterra Malaysia Sdn. Bhd.
- Applicant Address: MY Kulim
- Assignee: SILTERRA MALAYSIA SDN. BHD.
- Current Assignee: SILTERRA MALAYSIA SDN. BHD.
- Current Assignee Address: MY Kulim
- Agency: Smirman IP Law, PLLC
- Agent Preston Smirman
- Priority: MYPI2016704442 20161130
- Main IPC: H01L27/20
- IPC: H01L27/20 ; B81C1/00 ; H03H9/25 ; H03H9/17 ; H03H9/05

Abstract:
Monolithic integrated device having an architecture that allows an acoustic device to transduce either surface acoustic waves or bulk acoustic waves, comprising: a substrate layer being the base of the device; an inter-layer dielectric disposed on top of the substrate layer; an electronic circuitry substantially formed in the inter-layer dielectric and supported by the substrate layer, the electronic circuitry comprises a plurality of metal layers; and a piezoelectric layer being sandwiched between a top electrode and a bottom electrode within the inter-layer dielectric. The top electrode is an upper metal layer belonging to the electronic circuitry and the bottom electrode is a lower metal layer belonging to the electronic circuitry. To transduce the bulk acoustic waves, the inter-layer dielectric is formed with a top cavity above the top electrode and a bottom cavity below the bottom electrode.
Public/Granted literature
- US20180151622A1 MONOLITHIC INTEGRATED DEVICE Public/Granted day:2018-05-31
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