Invention Grant
- Patent Title: Silicon carbide semiconductor device
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Application No.: US15763980Application Date: 2016-09-29
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Publication No.: US10199457B2Publication Date: 2019-02-05
- Inventor: Rina Tanaka , Yutaka Fukui , Katsutoshi Sugawara , Takeharu Kuroiwa , Yasuhiro Kagawa
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-236370 20151203
- International Application: PCT/JP2016/078902 WO 20160929
- International Announcement: WO2017/094339 WO 20170608
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/16 ; H01L29/04 ; H01L21/04 ; H01L29/78 ; H01L29/66 ; H01L29/10

Abstract:
A silicon carbide semiconductor device includes a silicon carbide drift layer formed on an upper surface of a silicon carbide semiconductor substrate having an off angle, a body region, a source region, a plurality of trenches, a gate insulating film, a gate electrode, a source electrode, a drain electrode, and a depletion suppressing layer. The depletion suppressing layer is positioned to be sandwiched between the plurality of trenches in a plan view, and in a direction with the off angle of the silicon carbide semiconductor substrate, a distance between the depletion suppressing layer and one of the trenches adjacent to the depletion suppressing layer is different from another distance between the depletion suppressing layer and the other one of the trenches adjacent to the depletion suppressing layer.
Public/Granted literature
- US20180358429A1 SILICON CARBIDE SEMICONDUCTOR DEVICE Public/Granted day:2018-12-13
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