Invention Grant
- Patent Title: Semiconductor device including active fin
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Application No.: US15060265Application Date: 2016-03-03
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Publication No.: US10199499B2Publication Date: 2019-02-05
- Inventor: Sung-Min Kim , Dong-Ho Cha , Sunhom Steve Paak
- Applicant: Sung-Min Kim , Dong-Ho Cha , Sunhom Steve Paak
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0038686 20150320
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L29/165 ; H01L29/78 ; H01L27/11 ; H01L27/092 ; H01L27/02

Abstract:
A semiconductor device includes first through fourth active fins, which extend alongside one another in a first direction; and a field insulating film that covers lower portions of the first through fourth active fins, the first and second active fins protrude from the field insulating film at a first height, the third active fin protrudes from the field insulating film at a second height different from the first height, and an interval between the first and second active fins is different from an interval between the third and fourth active fins.
Public/Granted literature
- US20160276482A1 SEMICONDUCTOR DEVICE INCLUDING ACTIVE FIN Public/Granted day:2016-09-22
Information query
IPC分类: