Invention Grant
- Patent Title: Copper-gallium sputtering target
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Application No.: US15025312Application Date: 2014-09-26
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Publication No.: US10202681B2Publication Date: 2019-02-12
- Inventor: Christian Linke , Thomas Scherer
- Applicant: PLANSEE SE
- Applicant Address: AT Reutte
- Assignee: Plansee SE
- Current Assignee: Plansee SE
- Current Assignee Address: AT Reutte
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- International Application: PCT/AT2014/000174 WO 20140926
- International Announcement: WO2015/042622 WO 20150402
- Main IPC: C23C14/34
- IPC: C23C14/34 ; B22F3/105 ; C22C9/00 ; C22C1/04 ; B22F1/00 ; B22F3/115 ; B22F3/14 ; B22F5/00 ; B22F9/04 ; C22C28/00 ; C23C14/14 ; H01J37/34

Abstract:
A Ga-containing and Cu-containing sputtering target has a Ga content of from 30 to 68 at %. The sputtering target contains only CuGa2 as Ga-containing and Cu-containing intermetallic phase or the proportion by volume of CuGa2 is greater than the proportion by volume of Cu9Ga4. The sputtering target is advantageously produced by spark plasma sintering or cold gas spraying. Compared to Cu9Ga4, CuGa2 is very soft, which aids the production of defect-free sputtering targets having homogeneous sputtering behavior.
Public/Granted literature
- US20160230266A1 COPPER-GALLIUM SPUTTERING TARGET Public/Granted day:2016-08-11
Information query
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