Invention Grant
- Patent Title: Process for producing group III nitride crystal and apparatus for producing group III nitride crystal
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Application No.: US15123565Application Date: 2015-03-03
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Publication No.: US10202710B2Publication Date: 2019-02-12
- Inventor: Yusuke Mori , Masashi Yoshimura , Mamoru Imade , Masashi Isemura , Yoshio Okayama
- Applicant: OSAKA UNIVERSITY , ITOCHU PLASTICS INC. , PANASONIC CORPORATION
- Applicant Address: JP Osaka JP Tokyo JP Osaka
- Assignee: Osaka University,Itochu Plastics Inc.,Panasonic Corporation
- Current Assignee: Osaka University,Itochu Plastics Inc.,Panasonic Corporation
- Current Assignee Address: JP Osaka JP Tokyo JP Osaka
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2014-041078 20140303
- International Application: PCT/JP2015/056130 WO 20150303
- International Announcement: WO2015/133443 WO 20150911
- Main IPC: C30B29/40
- IPC: C30B29/40 ; C30B19/02 ; C30B25/20 ; C30B29/38 ; C30B33/00 ; H01L21/02 ; B28D5/00 ; C30B19/12 ; C30B25/18 ; C30B29/20 ; H01L21/78 ; H01L29/20 ; H01L33/00 ; H01L33/12 ; H01L33/32 ; H01S5/30

Abstract:
A large Group III nitride crystal of high quality with few defects such as a distortion, a dislocation, and warping is produced by vapor phase epitaxy. A method for producing a Group III nitride crystal includes: a first Group III nitride crystal production process of producing a first Group III nitride crystal 1003 by liquid phase epitaxy; and a second Group III nitride crystal production process of producing a second Group III nitride crystal 1004 on the first crystal 1003 by vapor phase epitaxy by causing a Group III element metal to react with an oxidizing agent and nitrogen-containing gas. In the first Group III nitride crystal production process, the surfaces of seed crystals 1003a (preliminarily provided Group III nitride) are brought into contact with an alkali metal melt, a Group III element and nitrogen are cause to react with each other in a nitrogen-containing atmosphere in the alkali metal melt, and the Group III nitride crystals are bound together by growth of the Group III nitride crystals grown from the seed crystals 1003a to produce a first crystal 1003.
Public/Granted literature
- US20170073840A1 PROCESS FOR PRODUCING GROUP III NITRIDE CRYSTAL AND APPARATUS FOR PRODUCING GROUP III NITRIDE CRYSTAL Public/Granted day:2017-03-16
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