Invention Grant
- Patent Title: Micro object detection apparatus
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Application No.: US15772405Application Date: 2016-12-08
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Publication No.: US10203280B2Publication Date: 2019-02-12
- Inventor: Kenya Nakai
- Applicant: MITSUBISHI ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP.
- Priority: JP2015-243250 20151214; JP2016-017780 20160202
- International Application: PCT/JP2016/086550 WO 20161208
- International Announcement: WO2017/104533 WO 20170622
- Main IPC: G01N21/49
- IPC: G01N21/49 ; G01N15/02 ; G01N21/21 ; G01N15/06

Abstract:
A micro object detection apparatus includes an optical system. The first optical system includes a first reflection region, a second reflection region, and a light reception element. The first reflection region has an ellipsoidal shape, and reflects scattered light scattered when irradiation light hits a particle to direct the scattered light to the light reception element, by utilizing two focal point positions of the ellipsoidal shape. The second reflection region reflects scattered light coming from the particle to direct the scattered light to the first reflection region, so that the scattered light is directed to the light reception element by utilizing the ellipsoidal shape of the first reflection region. The light flux diameter of the scattered light reflected by the second reflection region is larger than the particle, at the position of the particle at which the scattered light is generated.
Public/Granted literature
- US10241043B2 Micro object detection apparatus Public/Granted day:2019-03-26
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