Invention Grant
- Patent Title: Inspection system and a method for inspecting a diced wafer
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Application No.: US12064355Application Date: 2006-08-29
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Publication No.: US10203289B2Publication Date: 2019-02-12
- Inventor: Yuri Postolov , Menachem Regensburger
- Applicant: Yuri Postolov , Menachem Regensburger
- Applicant Address: IL Migdal Haemek
- Assignee: CAMTEK LTD.
- Current Assignee: CAMTEK LTD.
- Current Assignee Address: IL Migdal Haemek
- Agency: Reches Patents
- International Application: PCT/IL2006/000996 WO 20060829
- International Announcement: WO2007/026351 WO 20070308
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/956 ; H01L21/67

Abstract:
An inspection system and a method for inspecting a diced wafer. The method includes: acquiring multiple images of multiple portions of the diced wafer according to a predefined image acquisition scheme; locating multiple unique features within the multiple images; and assigning a die index to each die of the multiple dice and associating between the multiple dice and multiple reference dice in response to locations of the multiple unique features and to at least one expected die dimension.
Public/Granted literature
- US20110310241A1 INSPECTION SYSTEM AND A METHOD FOR INSPECTING A DICED WAFER Public/Granted day:2011-12-22
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