Invention Grant
- Patent Title: Cantilever for a scanning type probe microscope
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Application No.: US15850430Application Date: 2017-12-21
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Publication No.: US10203354B2Publication Date: 2019-02-12
- Inventor: Masashi Kitazawa , Michitsugu Arima , Masaki Tanemura
- Applicant: National University Corporation Nagoya Institute of Technology , OLYMPUS CORPORATION
- Applicant Address: JP Nagoya-shi, Aichi JP Tokyo
- Assignee: National University Corporation Nagoya Institute of Technology,OLYMPUS CORPORATION
- Current Assignee: National University Corporation Nagoya Institute of Technology,OLYMPUS CORPORATION
- Current Assignee Address: JP Nagoya-shi, Aichi JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: G01Q60/54
- IPC: G01Q60/54 ; G01Q60/56 ; G01Q70/12 ; G01Q70/10
Abstract:
The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.
Public/Granted literature
- US20180136253A1 CANTILEVER Public/Granted day:2018-05-17
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