Invention Grant
- Patent Title: Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method
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Application No.: US15807356Application Date: 2017-11-08
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Publication No.: US10203496B2Publication Date: 2019-02-12
- Inventor: Osamu Tanitsu
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52 ; G02B26/08 ; G03F7/20
Abstract:
One embodiment relates to a spatial light modulator unit comprising: a spatial light modulator with a plurality of optical elements; a spatial light modulation element applying spatial light modulation to the incident light and making rays of intensity levels according to positions of the respective optical elements; and a control unit.
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