Invention Grant
- Patent Title: Efficient thermo-optic phase shifters using multi-pass heaters
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Application No.: US15598603Application Date: 2017-05-18
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Publication No.: US10203525B2Publication Date: 2019-02-12
- Inventor: Douglas M. Gill , Chi Xiong
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: G02F1/035
- IPC: G02F1/035 ; G02F1/01 ; G02B6/132 ; G02B6/136 ; G02F1/025

Abstract:
Techniques for increasing efficiency of thermo-optic phase shifters using multi-pass heaters and thermal bridges are provided. In one aspect, a thermo-optic phase shifter device includes: a plurality of optical waveguides formed in an SOI layer over a buried insulator; at least one heating element adjacent to the optical waveguides; and thermal bridges connecting at least one of the optical waveguides directly to the heating element. A method for forming a thermo-optic phase shifter device is also provided.
Public/Granted literature
- US20170255031A1 Efficient Thermo-Optic Phase Shifters Using Multi-Pass Heaters Public/Granted day:2017-09-07
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