Invention Grant
- Patent Title: Substrate supporting structure and exposure machine
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Application No.: US15747567Application Date: 2017-05-03
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Publication No.: US10203603B2Publication Date: 2019-02-12
- Inventor: Liu Liu , Jinbao Peng , Pengcheng Shi
- Applicant: BOE Technology Group Co., Ltd. , Hefei BOE Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201610379882 20160531
- International Application: PCT/CN2017/082851 WO 20170503
- International Announcement: WO2017/206651 WO 20171207
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/677

Abstract:
The present disclosure refers to a substrate supporting structure and an exposure machine. In one embodiment, the substrate supporting structure includes a plurality of lifting members and a first drive mechanism, top ends of the plurality of lifting members are in a same horizontal plane, and the first drive mechanism is capable of driving at least one of the lifting members to move horizontally. The substrate supporting structure according to the present disclosure is for supporting a substrate.
Public/Granted literature
- US20180210343A1 Substrate Supporting Structure And Exposure Machine Public/Granted day:2018-07-26
Information query
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