Substrate supporting structure and exposure machine
Abstract:
The present disclosure refers to a substrate supporting structure and an exposure machine. In one embodiment, the substrate supporting structure includes a plurality of lifting members and a first drive mechanism, top ends of the plurality of lifting members are in a same horizontal plane, and the first drive mechanism is capable of driving at least one of the lifting members to move horizontally. The substrate supporting structure according to the present disclosure is for supporting a substrate.
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