Invention Grant
- Patent Title: Method of determining colorability of a semiconductor device and system for implementing the same
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Application No.: US14990446Application Date: 2016-01-07
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Publication No.: US10204205B2Publication Date: 2019-02-12
- Inventor: Chung-Yun Cheng , Chin-Chang Hsu , Hsien-Hsin Sean Lee , Jian-Yi Li , Li-Sheng Ke , Wen-Ju Yang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/70

Abstract:
A method of determining colorability of a layer of a semiconductor device includes iteratively decomposing a conflict graph to remove all nodes having fewer links than a threshold number of links. The method further includes determining whether the decomposed conflict graph is a simplified graph. The method further includes partitioning, using a specific purpose processing device, the decomposed conflict graph if the decomposed conflict graph is not a simplified graph. The method further includes determining whether the decomposed conflict graph is colorable based on a number of masks used to pattern the layer of the semiconductor device if the decomposed conflict graph is a simplified graph. The method further includes flagging violations if the decomposed conflict graph is not colorable.
Public/Granted literature
- US20170199957A1 METHOD OF DETERMINING COLORABILITY OF A SEMICONDUCTOR DEVICE AND SYSTEM FOR IMPLEMENTING THE SAME Public/Granted day:2017-07-13
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