Invention Grant
- Patent Title: Vacuum adsorption system, method and packaging device for mother substrate to be packaged
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Application No.: US14785641Application Date: 2015-04-16
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Publication No.: US10204815B2Publication Date: 2019-02-12
- Inventor: Jiuxia Yang , Feng Bai
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201410568435 20141022
- International Application: PCT/CN2015/076707 WO 20150416
- International Announcement: WO2016/062038 WO 20160428
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L21/683 ; H01L21/68 ; H01L21/67

Abstract:
Vacuum adsorption system of the invention includes: vacuum adsorption platform; carrying platform, which is provided on vacuum adsorption platform and edges thereof are sealed with edges of vacuum adsorption platform, configured to carrying mother substrate to be packaged and provided thereon with a plurality of adsorption units used for adsorbing and fixing, in cooperation with vacuum adsorption platform, mother substrate to be packaged; detection unit, configured to detect positional relationships between adsorption units on carrying platform and packaging areas on mother substrate to be packaged; and adjustment unit, configured to adjust position of carrying platform when detection unit detects that positions of adsorption units on carrying platform are overlapped with packaging areas on mother substrate to be packaged, so that positions of at least part of adsorption units on carrying platform are not overlapped with packaging areas on mother substrate to be packaged.
Public/Granted literature
- US20160254175A1 VACUUM ADSORPTION SYSTEM, METHOD AND PACKAGING DEVICE FOR MOTHER SUBSTRATE TO BE PACKAGED Public/Granted day:2016-09-01
Information query
IPC分类: