Vacuum adsorption system, method and packaging device for mother substrate to be packaged
Abstract:
Vacuum adsorption system of the invention includes: vacuum adsorption platform; carrying platform, which is provided on vacuum adsorption platform and edges thereof are sealed with edges of vacuum adsorption platform, configured to carrying mother substrate to be packaged and provided thereon with a plurality of adsorption units used for adsorbing and fixing, in cooperation with vacuum adsorption platform, mother substrate to be packaged; detection unit, configured to detect positional relationships between adsorption units on carrying platform and packaging areas on mother substrate to be packaged; and adjustment unit, configured to adjust position of carrying platform when detection unit detects that positions of adsorption units on carrying platform are overlapped with packaging areas on mother substrate to be packaged, so that positions of at least part of adsorption units on carrying platform are not overlapped with packaging areas on mother substrate to be packaged.
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