Invention Grant
- Patent Title: Substrate retaining carrier, method for retaining and separating substrate and method for evaporation
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Application No.: US15279872Application Date: 2016-09-29
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Publication No.: US10204816B2Publication Date: 2019-02-12
- Inventor: Xuequan Jin , Chia Hao Chang
- Applicant: BOE Technology Group Co., Ltd. , HEFEI Xinsheng Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing CN Hefei
- Assignee: BOE Technology Group Co., Ltd.,Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.,Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing CN Hefei
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201510729440 20151030
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/687 ; H01L51/00 ; H01L51/56 ; H01L27/32

Abstract:
A substrate retaining carrier, a method for retaining and separating the substrate, and a method for evaporation are provided. The substrate retaining carrier includes a substrate stage and a movable substrate retaining support device, the substrate retaining support device comprises multiple probes and a probe holder, wherein a first end of each of the probes is provided with a substrate retaining member, and a second end of each of the probes is secured onto the probe holder; the substrate stage is provided with through holes for passage of the probes therein.
Public/Granted literature
- US20170125278A1 Substrate Retaining Carrier, Method for Retaining and Separating Substrate and Method for Evaporation Public/Granted day:2017-05-04
Information query
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