Invention Grant
- Patent Title: Tunneling field effect transistor
-
Application No.: US15365965Application Date: 2016-12-01
-
Publication No.: US10204903B2Publication Date: 2019-02-12
- Inventor: Ping Zheng , Eng Huat Toh
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP PTE Ltd.
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L29/78

Abstract:
Devices and methods for forming a device are disclosed. A substrate is provided. A plurality of fin structures are formed in the substrate. The fin structures include an upper part and a lower part. An isolation layer is formed on the substrate. The lower part of the plurality of fin structures is embedded in the isolation layer. A source including a first source portion and a second source portion is formed in a first side of the substrate. The first source portion partially occupies the fin structures along a length direction. The second source portion is formed over the first source portion. The second source portion elevates the fin structures. A drain is formed in a second side of the substrate. A distance between the source to the drain defines a channel region. A gate having a gate dielectric and a metal gate electrode is formed over the substrate. The gate wraps around the elevated fin structures and channel region.
Public/Granted literature
- US20180158817A1 TUNNELING FIELD EFFECT TRANSISTOR Public/Granted day:2018-06-07
Information query
IPC分类: