Methods of making a dry powder, comprise (a) delivering a liquid solution or suspension and a second, immiscible fluid to a flow path, (b) transporting the liquid solution or suspension and the immiscible fluid along the flow path, wherein the flow path includes two or more flow passages of different diameters, at least one flow divider which divides and diverts the flowing mixture into at least two separate passages, wherein the separate passages subsequently intersect to combine their respective flows into a single flowing stream, (c) rapidly reducing the pressure of the single flowing stream, whereby droplets are formed, and (d) passing the droplets through a flow of inert drying gas to form a dry powder. A nebulizing nozzle includes an inlet, a flow path as described, and a restrictor nozzle outlet.