Invention Grant
- Patent Title: Cylindrical base, master and master manufacturing method
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Application No.: US15026509Application Date: 2014-12-04
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Publication No.: US10207470B2Publication Date: 2019-02-19
- Inventor: Yutaka Muramoto , Masanao Kikuchi , Shunichi Kajiya , Takaaki Otowa , Yasuhiro Takahashi
- Applicant: DEXERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DEXERIALS CORPORATION
- Current Assignee: DEXERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-264358 20131220
- International Application: PCT/JP2014/082171 WO 20141204
- International Announcement: WO2015/093308 WO 20150625
- Main IPC: B29D11/00
- IPC: B29D11/00 ; B29C41/28 ; G11B7/26 ; C03C15/00 ; B29C33/38 ; B29C59/04 ; B29C33/42 ; B29C35/08 ; G03F7/00 ; G03F7/24 ; B29L11/00

Abstract:
Provided are a cylindrical base, a master and a method for manufacturing a master enabling a uniform transfer of a fine pattern. A cylindrical base of a quartz glass having an internal strain in terms of birefringence of less than 70 nm/cm is used. A resist layer is deposited to an outer circumference surface of this cylindrical base, a latent image is formed on the resist layer, the latent image formed on the resist layer is developed and the pattern of the developed resist layer is used as a mask for etching to form a structure including concaves or convexes arranged in a plurality of rows on the outer circumference surface of the cylindrical base.
Public/Granted literature
- US20160214282A1 Cylindrical Base, Master and Master Manufacturing Method Public/Granted day:2016-07-28
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