Invention Grant
- Patent Title: MEMS devices on flexible substrate
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Application No.: US15306569Application Date: 2015-05-11
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Publication No.: US10207916B2Publication Date: 2019-02-19
- Inventor: Phillip J. Bergeron , Brent D. Lunceford , John D. Geissinger , Douglas B. Gundel , Justine A. Mooney , Ravi Palaniswamy , Siang Sin Foo
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Agent Clifton F. Richardson
- International Application: PCT/US2015/030158 WO 20150511
- International Announcement: WO2015/183534 WO 20151203
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00
Abstract:
A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.
Public/Granted literature
- US20170073215A1 MEMS DEVICES ON FLEXIBLE SUBSTRATE Public/Granted day:2017-03-16
Information query
