Invention Grant
- Patent Title: Bubble and foam solutions using a completely immersed air-free feedback flow control valve
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Application No.: US15442519Application Date: 2017-02-24
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Publication No.: US10208395B2Publication Date: 2019-02-19
- Inventor: Richard Abraham , Robert Rash , David W. Porter , Steven T. Mayer , John Ostrowski
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25B9/00
- IPC: C25B9/00 ; C25B15/08 ; C25B15/02 ; C25D17/02 ; C25D21/04 ; C25D17/00 ; C25D5/08 ; C25D21/12 ; G01F23/14 ; G01F23/26 ; G01F23/296

Abstract:
The embodiments disclosed herein relate to methods and apparatus for promoting bubble-free circulation of processing fluids in a recirculation system. Certain disclosed techniques involve passive, mechanical valve designs that promote variable resistance to flow in a drain. Other techniques involve automated flow control schemes that utilize feedback from flow meters, level sensors, etc. to achieve a balanced and bubble-free flow. The disclosed embodiments greatly reduce the incorporation of gas into a processing fluid, in particular as the processing fluid returns from a processing cell to a reservoir.
Public/Granted literature
- US20170167045A1 BUBBLE AND FOAM SOLUTIONS USING A COMPLETELY IMMERSED AIR-FREE FEEDBACK FLOW CONTROL VALVE Public/Granted day:2017-06-15
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