Invention Grant
- Patent Title: MEMS gyroscope device
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Application No.: US15172429Application Date: 2016-06-03
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Publication No.: US10209070B2Publication Date: 2019-02-19
- Inventor: Aaron A. Geisberger
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: G01C19/574
- IPC: G01C19/574 ; G01C19/5747

Abstract:
A microelectromechanical system (MEMS) gyroscope device includes a substrate having a surface parallel to a plane; first and second proof masses driven to slide back and forth past one another in a first directional axis of the plane, where the first and second proof masses respectively have a first and second recess in a respective side closest to the other proof mass; a pivot structure coupled to the first proof mass within the first recess and to the second proof mass within the second recess; an anchor between the first and second recesses and coupled to a mid-point of the pivot structure; and third and fourth proof masses driven to move toward and away from one another in a second directional axis of the plane that is perpendicular to the first directional axis; where the proof masses move in response to angular velocity in one or more directional axes.
Public/Granted literature
- US20170350701A1 MEMS GYROSCOPE DEVICE Public/Granted day:2017-12-07
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