Invention Grant
- Patent Title: Position detection apparatus, machine tool apparatus, and exposure apparatus
-
Application No.: US15453232Application Date: 2017-03-08
-
Publication No.: US10209102B2Publication Date: 2019-02-19
- Inventor: Chihiro Nagura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2016-049750 20160314
- Main IPC: G01D5/38
- IPC: G01D5/38 ; G01D5/347 ; G03F7/20 ; G05B19/402 ; G05B19/418

Abstract:
A position detection apparatus (100) includes a scale (20) including a reference position grating (22), a detector (10), a detection grating (19), and a signal processor (10), the signal processor acquires a relative reference position between the scale and the detector by using a light intensity distribution of a divergent light beam obtained via the reference position grating and the detection grating, the detection grating has a first spatial frequency that is offset by a predetermined frequency offset amount with respect to a local spatial frequency of an interference image from the reference position grating, the detection grating is provided in an optical path between the scale and a light receiver of the detector, and the light receiver detects a component of a second spatial frequency that is lower than the first spatial frequency in the light intensity distribution transmitting through the detection grating.
Public/Granted literature
- US20170261351A1 POSITION DETECTION APPARATUS, MACHINE TOOL APPARATUS, AND EXPOSURE APPARATUS Public/Granted day:2017-09-14
Information query
IPC分类: