Invention Grant
- Patent Title: Waveform mapping and gated laser voltage imaging
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Application No.: US15344366Application Date: 2016-11-04
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Publication No.: US10209301B2Publication Date: 2019-02-19
- Inventor: Christopher Nemirow , Neel Leslie
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: G01R31/308
- IPC: G01R31/308 ; G01R31/311 ; G01R31/01 ; G02B21/00 ; G01R31/317

Abstract:
Systems, methods, and computer readable media to improve integrated circuit (IC) debug operations are described. In general, techniques are disclosed for acquiring/recording waveforms across an under-test IC during a single sweep of a laser scanning microscope (LSM). More particularly, techniques disclosed herein permit the acquisition of an integrated circuit's response to a test signal at each location across the IC in real-time. In practice the test signal consists of a stimulus portion that repeats after a given period. In one embodiment, the IC's response to multiple complete stimulus portions may be averaged and digitized. In another embodiment, the IC's response to multiple partial stimulus portions may be averaged and digitized. As used herein, the former approach is referred to as waveform mapping, the latter as gated-LVI.
Public/Granted literature
- US20170131349A1 Waveform Mapping and Gated Laser Voltage Imaging Public/Granted day:2017-05-11
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