Invention Grant
- Patent Title: Integrated circuits having tunnel transistors and methods for fabricating the same
-
Application No.: US14844522Application Date: 2015-09-03
-
Publication No.: US10211338B2Publication Date: 2019-02-19
- Inventor: Eng Huat Toh , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/283 ; H01L21/02 ; H01L29/423 ; H01L29/08 ; H01L29/06 ; H01L29/10 ; H01L29/36 ; H01L21/306 ; H01L29/739

Abstract:
Integrated circuits including tunnel transistors and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated device includes forming a lower source/drain region in and/or over a semiconductor substrate. The method forms a channel region overlying the lower source/drain region. The method also forms an upper source/drain region overlying the channel region. The method includes forming a gate structure beside the channel region.
Public/Granted literature
- US20170069753A1 INTEGRATED CIRCUITS HAVING TUNNEL TRANSISTORS AND METHODS FOR FABRICATING THE SAME Public/Granted day:2017-03-09
Information query
IPC分类: