Invention Grant
- Patent Title: Germanium photodiode
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Application No.: US15797230Application Date: 2017-10-30
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Publication No.: US10211352B2Publication Date: 2019-02-19
- Inventor: Shinichi Watanuki , Futoshi Komatsu , Tomoo Nakayama , Takashi Ogura , Teruhiro Kuwajima
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Koutou-ku, Tokyo
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Koutou-ku, Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2016-223188 20161116
- Main IPC: H01L31/028
- IPC: H01L31/028 ; H01L31/02 ; H01L31/0232

Abstract:
Germanium (Ge) contamination to a semiconductor manufacturing apparatus is suppressed. Germanium is a dissimilar material in a silicon semiconductor process. A semiconductor device is provided with a Ge photodiode including an n-type germanium layer, and a plug capacitively coupled to the n-type germanium layer. In other words, the n-type germanium layer of the Ge photodiode and the plug are not in direct contact with each other but are capacitively coupled to each other.
Public/Granted literature
- US20180138325A1 SEMICONDUCTOR DEVICE Public/Granted day:2018-05-17
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