Invention Grant
- Patent Title: Terahertz detector using field-effect transistor
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Application No.: US15537064Application Date: 2015-01-23
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Publication No.: US10211511B2Publication Date: 2019-02-19
- Inventor: Kyung Rok Kim , Min Woo Ryu , Kwan Sung Kim
- Applicant: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Applicant Address: KR Ulsan
- Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee: UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Current Assignee Address: KR Ulsan
- Agency: Hodgson Russ LLP
- International Application: PCT/KR2015/000692 WO 20150123
- International Announcement: WO2016/117724 WO 20160728
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01Q1/22 ; G01R33/00 ; G01J5/20 ; H01L27/14 ; H01L29/417 ; H01L29/423 ; H01L29/78 ; G01R33/06 ; H01L29/06

Abstract:
The purpose of the present invention is to provide a terahertz detector using a field-effect transistor capable of implementing high sensitivity by exhibiting an asymmetric characteristic only with a form of a source/drain and a gate. To this end, the present invention relates to the terahertz detector using a field-effect transistor comprising: a source formed by being doped on a portion of a silicon base; a channel formed so as to encompass the source on a plane; a drain formed outside the channel; a dielectric layer formed on an upper end of the source, the channel and the drain; and a gate located at an upper end of the dielectric layer, wherein when terahertz electromagnetic waves are applied through the gate, the intensity of the electromagnetic waves is detected using a current/voltage outputted from the source and the drain.
Public/Granted literature
- US20170358840A1 TERAHERTZ DETECTOR USING FIELD-EFFECT TRANSISTOR Public/Granted day:2017-12-14
Information query
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