X-ray pulse source (100) for generating X-ray pulses (1) includes electron pulse source device (10) including photo-emitter device (11) being configured for photo-induced creation of free electron pulses (2) and driver device (12) being configured for creating electromagnetic driver pulses (3) accelerating electron pulses (2) along acceleration path (7), and electromagnetic interaction device (50) comprising electromagnetic pulse source device (51) being configured for creating electromagnetic pulses (4) in interaction section (5) of electromagnetic interaction device (50), wherein electron pulse source device (10) and electromagnetic interaction device (50) are operable for generating X-ray pulses (1) by an interaction of electron pulses (2) and electromagnetic pulses (4), and driver device (12) includes THz driver pulse source (13), which is configured for creating single cycle or multi cycle THz driver pulses (3). Furthermore, a method of creating X-ray pulses (1) is described.