Invention Grant
- Patent Title: Polishing pad and method for manufacturing same
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Application No.: US14902060Application Date: 2014-07-01
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Publication No.: US10213895B2Publication Date: 2019-02-26
- Inventor: Hiroshi Kashiwada , Kenichi Koike , Shin Tokushige
- Applicant: FUJIBO HOLDINGS, INC.
- Applicant Address: JP Chuo-Ku, Tokyo
- Assignee: FUJIBO HOLDINGS, INC.
- Current Assignee: FUJIBO HOLDINGS, INC.
- Current Assignee Address: JP Chuo-Ku, Tokyo
- Agency: Buchanan, Ingersoll & Rooney PC
- Priority: JP2013-139041 20130702
- International Application: PCT/JP2014/067552 WO 20140701
- International Announcement: WO2015/002199 WO 20150108
- Main IPC: B24B37/24
- IPC: B24B37/24 ; H01L21/02 ; H01L21/322 ; B24D3/28

Abstract:
A polishing pad comprising a resin-containing polishing cloth having a polishing cloth base impregnated with a polyurethane resin and silicon carbide, wherein the silicon carbide has a particle diameter in a range from 0.2 to 3.0 μm, and the content of the silicon carbide in the resin-containing polishing cloth is in a range from 60 to 500 parts by mass relative to 100 parts by mass of the polishing cloth base.
Public/Granted literature
- US20160136779A1 POLISHING PAD AND METHOD FOR MANUFACTURING SAME Public/Granted day:2016-05-19
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