Invention Grant
- Patent Title: Bellows-free retractable vacuum deposition sources
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Application No.: US14314995Application Date: 2014-06-25
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Publication No.: US10214806B2Publication Date: 2019-02-26
- Inventor: Eric Daniel Readinger , Rikki Scott LaBere , Richard Charles Bresnahan , Scott Wayne Priddy
- Applicant: Veeco Instruments Inc.
- Applicant Address: US NY Plainview
- Assignee: VEECO INSTRUMENTS INC.
- Current Assignee: VEECO INSTRUMENTS INC.
- Current Assignee Address: US NY Plainview
- Agency: Kagan Binder, PLLC
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/56 ; H01L51/00

Abstract:
Systems are provided that include one or more retractable deposition source assemblies that eliminate the need for a bellows, but do not require breaking the ultra-high vacuum of a growth module for source replacement or recharging with deposition material. Systems of the present invention may include source heads that allow for a differential pumping option that provides marked improvement in base pressure around the source head (and material) that provides longer lifetimes for sources in corrosive, reactive or oxidizing environments. In addition, systems of the invention do not require an entire growth module to be vented to refill or repair an effusion source. Instead, for maintenance events that are tied to a specific source, a retractable source assembly of the present invention allows the sources to be withdrawn from the system, isolated from the growth environment, and removed without venting the entire chamber of the growth module.
Public/Granted literature
- US20140373785A1 BELLOWS-FREE RETRACTABLE VACUUM DEPOSITION SOURCES Public/Granted day:2014-12-25
Information query
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