Invention Grant
- Patent Title: Control of current density in an electroplating apparatus
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Application No.: US15984162Application Date: 2018-05-18
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Publication No.: US10214829B2Publication Date: 2019-02-26
- Inventor: Zhian He , Ashwin Ramesh , Shantinath Ghongadi
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D5/18
- IPC: C25D5/18 ; C25D17/00 ; C25D17/12 ; C25D21/12

Abstract:
Various embodiments herein relate to methods and apparatus for electroplating metal onto substrates. In various cases, a reference electrode may be modified to promote improved electroplating results. The modifications may relate to one or more of the reference electrode's shape, position, relative conductivity compared to the electrolyte, or other design feature. In some particular examples the reference electrode may be dynamically changeable, for example having a changeable shape and/or position. In a particular example the reference electrode may be made of multiple segments. The techniques described herein may be combined as desired for individual applications.
Public/Granted literature
- US20180266006A1 CONTROL OF CURRENT DENSITY IN AN ELECTROPLATING APPARATUS Public/Granted day:2018-09-20
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